Cameca SX-Five
Field Emission Electron Microprobe
A Cameca SX-Five Field Emission Electron Probe Microanalyzer (EPMA) was purchased in 2014 with support from NSF (EAR-1337156), Department of Geoscience, College of Engineering, and UW-Madison Graduate School. This instrument is equipped with Field Emission electron source and several custom anticontamination devices to improve capabilities for ultra-high resolution imaging and X-ray analysis.

Cameca SXFive FE-EPMA (#944)
Electron Source
– Schottky Thermal Field Emission Electron Source
– Accelerating Voltage: 3-30 kV
– Beam Current: 0.1-700 nA
Detectors
– Secondary Electron (SE) Detector
– Backscattered Electron (BSE) Detector
– Cathodoluminescence (CL) Detector
– EDS Detector (Thermo UltraDry)
Wavelength Dispersive Spectrometers
Diffraction Crystals: LTAP, LPC2
Low-pressure Ar-gas flow proportional counter
Polypropylene Separation Window
Angle: -30 deg.
160 mm Rowland Circle
Diffraction Crystals: TAP, PET, LIF, PC2
Low-pressure Ar-gas flow proportional counter
Polypropylene Separation Window
Angle: 30 deg.
160 mm Rowland Circle
Diffraction Crystals: LPET, LLIF
High-pressure Ar-gas flow proportional counter
Mylar Separation Window
Angle: 150 deg.
160 mm Rowland Circle
Diffraction Crystals: TAP, PET, LIF, PC0
Low-pressure Ar-gas flow proportional counter
Polypropylene Separation Window
Angle: 210 deg.
160 mm Rowland Circle
Diffraction Crystals: LPET, LLIF
High-pressure Ar-gas flow proportional counter
Mylar Separation Window
Angle: 90 deg.
160 mm Rowland Circle
WDS Energy / Wavelength Limits (empirical; precise values depend on spectrometer tuning and alignment)
Additional Features
– Liquid Nitrogen Anticontamination System (ARS)
– Residual Gas Analyzer (SRS RGA 300)
– Plasma Cleaner (Ibss Group GV10x DS Asher)
– Optical Microscope with CCD Camera
– Haskris LX1-A1 Water Chiller
Vacuum System
– Agilent Tri-Scroll Dry Primary Pump
– Varian Turbo Molecular Pump
– Agilent StarCell UHV Ion Pump IMG1
– Agilent StarCell UHV Ion Pump IMG2
Software
– PeakSight v 6.4
– Probe Software Enterprise Edition
– Pathfinder v 2.4
– BadgerFilm Thin Film Analysis Program