EPMA

Cameca SXFive FE-EPMA (#944)

Electron Source
– Schottky Thermal Field Emission Electron Source
– Accelerating Voltage: 3-30 kV
– Beam Current: 0.1-700 nA

Detectors
– Secondary Electron (SE) Detector
– Backscattered Electron (BSE) Detector
– Cathodoluminescence (CL) Detector
– EDS Detector (Thermo UltraDry)

Wavelength Dispersive Spectrometers

  • WDS SP1
    Diffraction Crystals: LTAP, LPC2
    Low-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: -30 deg.
    160 mm Rowland Circle
  • WDS SP2
    Diffraction Crystals: TAP, PET, LIF, PC2
    Low-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: 30 deg.
    160 mm Rowland Circle
  • WDS SP3
    Diffraction Crystals: LPET, LLIF
    High-pressure Ar-gas flow proportional counter
    Mylar Separation Window
    Angle: 150 deg.
    160 mm Rowland Circle
  • WDS SP4
    Diffraction Crystals: TAP, PET, LIF, PC0
    Low-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: 210 deg.
    160 mm Rowland Circle
  • WDS SP5
    Diffraction Crystals: LPET, LLIF
    High-pressure Ar-gas flow proportional counter
    Mylar Separation Window
    Angle: 90 deg.
    160 mm Rowland Circle
  •  

    WDS Energy / Wavelength Limits (empirical; precise values depend on spectrometer tuning and alignment)

  • PC2 (2D = 97.794 A): 0.157 – 0.569 keV / 2.183 – 7.683 nm
  • PC1 (2D = 60.256 A): 0.258 – 0.931 keV / 1.332 – 4.813 nm
  • PC0 (2D = 47.120 A): 0.315 – 1.201 keV / 1.033 – 3.941 nm
  • TAP (2D = 25.745 A): 0.575 – 2.187 keV / 0.568 – 2.093 nm
  • PET (2D = 8.750 A): 1.688 – 6.300 keV / 0.198 – 0.717 nm
  • LIF (2D = 4.0267 A): 3.668 – 13.707 keV / 0.090 – 0.329 nm
  • Additional Features
    – Liquid Nitrogen Anticontamination System (ARS)
    – Residual Gas Analyzer (SRS RGA 300)
    – Plasma Cleaner (Ibss Group GV10x DS Asher)
    – Optical Microscope with CCD Camera
    – Haskris LX1-A1 Water Chiller

    Vacuum System
    – Agilent Tri-Scroll Dry Primary Pump
    – Varian Turbo Molecular Pump
    – Agilent StarCell UHV Ion Pump IMG1
    – Agilent StarCell UHV Ion Pump IMG2

    Software
    – PeakSight v 6.4
    – Probe Software Enterprise Edition
    – Pathfinder v 2.4
    – BadgerFilm Thin Film Analysis Program