Hitachi S-3400N Type-II
Variable Pressure SEM
The Ray and Mary Wilcox SEM Lab houses a Hitachi S3400 Variable Pressure Scanning Electron Microscope purchased with support from NSF (EAR-0447332) and the Department of Geoscience. The instrument was upgraded with new Oxford EDS and EBSD detectors in 2017.
Instrument Specs:
– Ultra Large Specimen Chamber
– Accommodates 300mm Diameter Specimens up to 60mm in Height
– Low vacuum range 6-270 Pa
– 5 Axis Motorized Computer Eucentric Stage (100mm x 50mm)
– 360° rotating stage with -20 – 90° tilt
– 130mm Observable area
– Three 35° take-off angle analytical ports with 10mm analytical WD
– Agilent IDP-15 dual-stage Scroll Pump
– W-filament electron source
Detectors:
SE – Everhart-Thornley Secondary Electron Detector
BSE – 5 Segment solid-state detector with Topo, Compo and 3D Mode
ESED – Environmental secondary electron detector
CL – Gatan PanaCL Cathodoluminescence system
EDS – Oxford 35 mm2 SDD Energy Dispersive X-ray Spectrometer
EBSD – Oxford C-Swift Electron Backscatter Diffraction Camera
Accelerating Voltage:
0.3 – 30 kV
Magnification:
x5-x300,000
Resolution:
SE (30 kV) = 3.0 nm
BSE (30 kV) = 4.0 nm