Electron Microbeam Laboratories

EPMA – SX-100

Cameca SX-100

Electron Microprobe

 

 

A Cameca SX-100 EPMA was received by donation from the US Department of Energy Los Alamos National Laboratories. Two additional SX-100s were received by donation from Macquarie University. Components of the three instruments were combined into a 5-spectrometer W-filament microprobe with off-axis ion pump.

Cameca SX-100 EPMA (#807/831/846)

Electron Source
– W-Filament Electron Source
– Accelerating Voltage: 3-30 kV
– Beam Current: 0.1-400 nA

Detectors
– Secondary Electron (SE) Detector
– Backscattered Electron (BSE) Detector

Wavelength Dispersive Spectrometers

  • WDS SP1
    Diffraction Crystals: TAP, PET, PC0, PC1
    Low-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: -30 deg.
    160 mm Rowland Circle

  • WDS SP2
    Diffraction Crystals: LLIF, PET
    High-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: 30 deg.
    160 mm Rowland Circle

  • WDS SP3
    Diffraction Crystals: LIF220, LPET
    High-pressure Ar-gas flow proportional counter
    Mylar Separation Window
    Angle: 150 deg.
    160 mm Rowland Circle

  • WDS SP4
    Diffraction Crystals: TAP, PC2
    Low-pressure Ar-gas flow proportional counter
    Polypropylene Separation Window
    Angle: 210 deg.
    160 mm Rowland Circle

  • WDS SP5
    Diffraction Crystals: LPET, LLIF
    High-pressure Ar-gas flow proportional counter
    Mylar Separation Window
    Angle: 90 deg.
    160 mm Rowland Circle

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    WDS Energy / Wavelength Limits (empirical; precise values depend on spectrometer tuning and alignment)

  • PC2 (2D = 93.531 A): 0.157 – 0.569 keV / 2.183 – 7.683 nm
  • PC1 (2D = 60.887 A): 0.258 – 0.931 keV / 1.332 – 4.813 nm
  • PC0 (2D = 44.679 A): 0.315 – 1.201 keV / 1.033 – 3.941 nm
  • TAP (2D = 25.745 A): 0.575 – 2.187 keV / 0.568 – 2.093 nm
  • PET (2D = 8.750 A): 1.688 – 6.300 keV / 0.198 – 0.717 nm
  • LIF (2D = 4.0267 A): 3.668 – 13.707 keV / 0.090 – 0.329 nm
  • LIF220 (2D = 2.848 A): 3.668 – 13.707 keV / 0.090 – 0.329 nm

    • Software
    – PeakSight v 3.4.2
    – Probe Software Enterprise Edition
    – BadgerFilm Thin Film Analysis Program