Hitachi S-3700N
Ultra Large Chamber Variable Pressure SEM
The Hitachi S-3700N VP-SEM was purchased with support from a UW2020 grant awarded to Prof. Chloe Bonamici for research into the properties and structure of ice and icy materials. The instrument is equipped with custom LN-cooled cryo-stage with 70 degree tilt for EBSD analysis of polycrystalline ice samples. The S-3700N is equipped with Amptek EDS detector specialized for X-ray spectroscopy of low-energy X-rays.
Instrument Specs:
– Ultra Large Specimen Chamber
– Accommodates 300mm Diameter Specimens up to 110mm in Height
– Low vacuum range 6-270 Pa
– 5 Axis Motorized Computer Eucentric Stage (110mm x 150mm)
– 360° rotating stage with -20 – 90° tilt
– 203mm Observable area
– Four 35° take-off angle analytical ports with 10mm analytical WD
– Specimen Exchange Chamber (127mm diameter x 40 mm high specimen)
– Agilent IDP-15 dual-stage Scroll Pump
– W-filament electron source
Detectors:
SE – Everhart-Thornley Secondary Electron Detector
BSE – 5 Segment Low Impedance BSE Detector with Topo, Compo and 3D Mode
ESED – Environmental secondary electron detector
EDS – Amptek Energy Dispersive X-ray Spectrometer
EBSD – Oxford C-Swift Electron Backscatter Diffraction Camera
Accelerating Voltage:
0.3 – 30 kV
Magnification:
x5-x300,000
Resolution:
SE (30 kV) = 3.0 nm
SE (3 kV) = 10 nm
BSE (30 kV) = 4.0 nm