Instrument Specs

Instrumentation Specifications

Cameca SX-Five FEG EPMA

1-30 kV Accelerating voltage

1-1000 nA beam current regulation

~60 nm spatial resolution

Schottky-type cold Field Emission W-Filament

Cameca SX-51 EPMA

1-30 kV Accelerating voltage

1-1000 nA beam current regulation

~100 nm spatial resolution

Hitachi S4300 VP-SEM

1-30 kV Accelerating voltage

1-1000 nA beam current regulation

~60 nm spatial resolution