Instrumentation Specifications
Cameca SX-Five FEG EPMA
1-30 kV Accelerating voltage
1-1000 nA beam current regulation
~60 nm spatial resolution
Schottky-type cold Field Emission W-Filament
Cameca SX-51 EPMA
1-30 kV Accelerating voltage
1-1000 nA beam current regulation
~100 nm spatial resolution
Hitachi S4300 VP-SEM
1-30 kV Accelerating voltage
1-1000 nA beam current regulation
~60 nm spatial resolution